維修服務maintain

Valve維修

  • 21251-1003Z-001 KF/ISO Bolted flange.
10”(250mm) Pneumatic gate valve.
For HDP CVD System

    21251-1003Z-001 KF/ISO Bolted flange. 10”(250mm) Pneumatic gate valve. For HDP CVD System

  • 88291-0349R-001 Bolted body
3.5”X49.
2”(88.9mmX1250mm) Slit valve. For AKT 15K PECVD System

    88291-0349R-001 Bolted body 3.5”X49. 2”(88.9mmX1250mm) Slit valve. For AKT 15K PECVD System

  • 02110-BA24  1.8”X9.
3”
(46mmX236mm) Pneumatic slit valve.
 For AXTRON MOCVD

    02110-BA24 1.8”X9. 3” (46mmX236mm) Pneumatic slit valve. For AXTRON MOCVD

  • 12050-PA14-0003 ISO-F
flange.
12” (320mm)Pneumatic gate valve

    12050-PA14-0003 ISO-F flange. 12” (320mm)Pneumatic gate valve

  • IFCON Angle valve 250-200. 
For AVB010&AVB40 LL/out vent

    IFCON Angle valve 250-200. For AVB010&AVB40 LL/out vent

  • MDC Isolation valve
AV-LAV-800-PAA02(8”). 
For AKT System

    MDC Isolation valve AV-LAV-800-PAA02(8”). For AKT System

  • 01034-KE01 & KE24 (Manual / ISO-KF flange 2〞(50mm) 
. For AMAT DXZ Producer/ASM E2000 RP

    01034-KE01 & KE24 (Manual / ISO-KF flange 2〞(50mm) . For AMAT DXZ Producer/ASM E2000 RP

  • 08040-FA44 DIN Centering flange. For 4〞(100mm)Pneumatic gate valve.
 For VARIAN VIISION

    08040-FA44 DIN Centering flange. For 4〞(100mm)Pneumatic gate valve. For VARIAN VIISION